A Planar Vibration Sensor for Mechanical Characterization of Nanowires

نویسندگان

  • L. Zhang
  • J. Lu
  • R. Maeda
چکیده

Nanowires have attracted considerable interest as the nanoscale interconnects and as the moving elements of both electronic and electromechanical devices. The evaluation of nanomechanical property plays a significant role in the development of new nanowire-based devices. Recently, we are engaged in developing an easy method for nanomechanical measurement by using an in-plane-mode piezoresistive vibration sensor fabricated with less process cost and package difficulties. Theoretical analysis and simulation results suggested that the device is capable of high-sensitive and variety, and it is expected to evaluate mechanical properties of metallic or metallic oxide nanowires.

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تاریخ انتشار 2013